We would, had we not needed 10-ish other machines to complete the process. Our machine only does the 'difficult' part (lithography), not all the nasty chemistry parts.

Admittedly, this means that my description of what the machine does was cutting some corners. Ridiculously many, actually, but ok :)

You build a Z axis with angstrom steps?

...I cannot begin to imagine what's involved in vibration control.

Not even close. We're building an "easy" machine, which can do about 1 micrometer precision. 1 km from where I work, there's ASML, the world's de-facto monopolist in high-end lithography. Most chips in your phone come from their machines. They're going towards the angstrom pretty fast, but they also need 500x the amount of engineers (and a frighteningly enormous pile of legacy code) to do that.

I hooked up a Xbox 360 controller to our wafer handling robot for fun.

How involved was that? Was the some kind of I/O protocol or were the buttons simply broken out?